Click Here to Download: https://ouo.io/I8Noy1 Acoustic Wave and Electromechanical Resonators By: Humberto Campanella Publisher: Artech House Print ISBN: 9781607839774, 1607839776 eText ISBN: 9781607839781, 1607839784 Edition: 1st Copyright year: 2010 Format: PDF Available from $ 164.00 USD SKU 9781607839781 This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.
