Fundamental Principles Of Engineering Nanometrology

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    Fundamental Principles of Engineering Nanometrology
    By: Richard Leach
    Publisher:
    William Andrew Publishing
    Print ISBN: 9780080964546, 0080964540
    eText ISBN: 9781437778328
    Pages: 352
    Copyright year: 2010
    Format: EPUB
    Available from $ 160.00 USD
    SKU 9781437778328
    Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.

    Provides a basic introduction to measurement and instruments
    Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
    Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal , variable focus, and scattering instruments)
    Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
    Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
    Additional ISBNs
    9781437778328, 1437778321
     

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