Handbook Of Semiconductor Manufacturing Technology

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    Handbook of Semiconductor Manufacturing Technology
    By: Yoshio Nishi
    Publisher:
    routledge
    Print ISBN: 9781574446753, 1574446754
    eText ISBN: 9781420017663, 1420017667
    Edition: 2nd
    Copyright year: 2007
    Format: PDF
    Available from $ 23.18 USD
    SKU 9781420017663R90
    Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on… Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.
    Additional ISBNs
    9781281127464, 9781420017663, 1281127469, 1420017667
     

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