Click Here to Download: https://ouo.io/0rLyxP High k Gate Dielectrics By: Michel Houssa Publisher: routledge Print ISBN: 9780750309066, 0750309067 eText ISBN: 9781420034141, 1420034146 Edition: 1st Copyright year: 2003 Format: PDF Available from $ 116.00 USD SKU 9781420034141R90 The drive toward smaller and smaller electronic componentry has huge implications for the materials currently being used. As quantum mechanical effects begin to dominate, conventional materials will be unable to function at scales much smaller than those in current use. For this reason, new materials with higher electrical permittivity will be required, making this is a subject of intensive research activity within the microelectronics community. High k Gate Dielectrics reviews the state-of-the-art in high permittivity gate dielectric research. Consisting of contributions from leading researchers from Europe and the USA, the book first describes the various deposition techniques used for construction of layers at these dimensions. It then considers characterization techniques of the physical, chemical, structural, and electronic properties of these materials. The book also reviews the theoretical work done in the field and concludes with technological applications. Additional ISBNs 9781280650970, 9781420034141, 1280650974, 1420034146
