Click Here to Download: https://ouo.io/UCAWsT Ion Implantation Technology - 94 By: Coffa, S.; Ferla, G.; Rimini, E.; Priolo, F. Publisher: North Holland Print ISBN: 9780444821942, 0444821945 eText ISBN: 9780444821942, 9780444599728, 044459972X Format: PDF Available from $ 366.00 USD SKU 9780444821942 The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters. The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.
