Click Here to Download: https://ouo.io/6FgL3Z Physical Design and Mask Synthesis for Directed Self-Assembly Lithography By: Seongbo Shim; Youngsoo Shin Publisher: Springer Print ISBN: 9783319762937, 3319762931 eText ISBN: 9783319762944, 331976294X Copyright year: 2018 Format: EPUB Available from $ 129.00 USD SKU 9783319762944 This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.
